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Details | |||||||
| Manufacturer: | Carl Zeiss | ||||||
| Type: | S-Planar Microlitho | ||||||
| Description: | High Resolution wafer stepper lens. Diffraction limited, resolution up to 1500 l/mm. 25cm height, 10 cm diameter, ca. 10 kilos weight. | ||||||
| Focal Lenght: | 50 | ||||||
| Aperture: | 1.6 | ||||||
| ApertureRange: | NA | ||||||
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| Mount: | special | ||||||
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| Value: | 0 | ||||||
| Collection: | RGM | ||||||
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