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Details | |||||||
| Manufacturer: | Carl Zeiss | ||||||
| Type: | S-Planar Microlitho | ||||||
| Description: | High Resolution wafer stepper lens. Diffraction limited, resolution up to 1500 l/mm. 30cm height, 11 cm diameter, ca. 10 kilos weight. | ||||||
| Focal Lenght: | 75 | ||||||
| Aperture: | 1.4 | ||||||
| ApertureRange: | NA | ||||||
| Magnification: | 5 | ||||||
| Opt. Magnification: | |||||||
| Mount: | special | ||||||
| Production Year: | |||||||
| Value: | 0 | ||||||
| Collection: | RGM | ||||||
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